Electronic braking pressure sensor
Application Area
It is a MEMS pressure sensor based on silicon piezoresistive effect. The die is made of silicon micromachining technology. The pressure to be measured is applied to the back of the silicon diaphragm. The reference vacuum is between the front of the silicon diaphragm and the glass substrate. The die and bonding wires are protected by silica gel. Within the tolerable pressure range, the pressure sensor outputs a voltage signal linearly proportional to the pressure; in a wide temperature range (-40 to +125°C) the sensor circuit provides accurate and stable signal output and temperature compensation.